Title:
超高純度ガスの製造方法及び製造装置
Document Type and Number:
Japanese Patent JP4072841
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide the manufacture of ultrahigh-purity gas which does not need to be provided with a compressor for a product while making the most of the merit of a dual rectifying column, and besides can manufacture ultrahigh- purity gas. SOLUTION: The manufacture of ultrahigh-purity gas has a process of manufacturing ultrahigh-purity gas by refining preliminarily refined material fluid in order, using a dual rectifying column where a rectifying column 10 on low pressure side and a rectifying column 20 on high pressure side are arranged above and below through a reboil capacitor 14. In the process, a part of the fluid on the column bottom side more than the supply part of the material fluid of the rectifying column 10 on low pressure side is extracted while supplying the rectifying part of the rectifying column 10 on low pressure side with the material fluid. Then it is pressurized by a booster, and ultrahigh-purity substance is recovered from more column top side than the supply part of the pressurized fluid of the rectifying column 20 on high pressure side, while introducing the pressurized fluid into the rectifying part or the column bottom of the rectifying column 20 on high pressure side.
Inventors:
Naohiko Yamashita
Shinji Tomita
Takao Yamamoto
Shinji Tomita
Takao Yamamoto
Application Number:
JP11561199A
Publication Date:
April 09, 2008
Filing Date:
April 23, 1999
Export Citation:
Assignee:
AIR LIQUIDE KOREA SERVICES Co., Ltd.
International Classes:
F25J3/02
Domestic Patent References:
| JP48026667A | ||||
| JP8014736A | ||||
| JP5187763A |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi
Kazuto Muronozono
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi
Kazuto Muronozono