Title:
基板処理装置、基板処理システム、およびプログラム
Document Type and Number:
Japanese Patent JP4073718
Kind Code:
B2
Inventors:
Takuji Yoshida
Tetsuya Hamada
Tetsuya Hamada
Application Number:
JP2002186302A
Publication Date:
April 09, 2008
Filing Date:
June 26, 2002
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03F7/30; H01L21/027; H01L21/304
Domestic Patent References:
| JP11128815A | ||||
| JP2001170539A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita