Title:
被加工物から基板を切り離す方法
Document Type and Number:
Japanese Patent JP4076130
Kind Code:
B2
Abstract:
A method for cutting up a workpiece which is in rod or block form by means of a saw, wherein the temperature of the workpiece is measured during the cutting, and the measurement signal is transmitted to a control unit, which generates a control signal which is used to control the temperature of the workpiece, or wherein the temperature of the workpiece is controlled during the cutting by a control signal based on a predetermined control curve.
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Inventors:
Holger Lund
Lotar hoover
Peter Wiesner
Lotar hoover
Peter Wiesner
Application Number:
JP2002133875A
Publication Date:
April 16, 2008
Filing Date:
May 09, 2002
Export Citation:
Assignee:
Siltronic AG
International Classes:
B24B27/06; B28D5/04; B28D5/00; B28D7/02; H01L21/301; H01L21/304
Domestic Patent References:
| JP11188570A | ||||
| JP11333664A | ||||
| JP2000141220A | ||||
| JP9123161A | ||||
| JP200162698A | ||||
| JP6155450A | ||||
| JP5200734A | ||||
| JP2262955A | ||||
| JP10138230A | ||||
| JP8290421A |
Foreign References:
| WO2000043162A1 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel