Title:
半導体装置
Document Type and Number:
Japanese Patent JP4078895
Kind Code:
B2
Inventors:
Isao Yoshikawa
Application Number:
JP2002184675A
Publication Date:
April 23, 2008
Filing Date:
June 25, 2002
Export Citation:
Assignee:
Fuji Electric Device Technology Co., Ltd.
International Classes:
H01L27/04; H01L29/78; H01L29/739
Attorney, Agent or Firm:
Hiroshi Yamamoto