Title:
プラズマ処理方法及びプラズマ処理装置
Document Type and Number:
Japanese Patent JP4079056
Kind Code:
B2
Inventors:
Yasushi Sawada
Noriyuki Taguchi
Keiichi Yamazaki
Tetsuji Shibata
Noriyuki Taguchi
Keiichi Yamazaki
Tetsuji Shibata
Application Number:
JP2003303610A
Publication Date:
April 23, 2008
Filing Date:
August 27, 2003
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
H01L21/3065
Domestic Patent References:
| JP2003171769A | ||||
| JP2003203902A |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori