Title:
CBD成膜装置
Document Type and Number:
Japanese Patent JP4080061
Kind Code:
B2
Inventors:
Hidenori Koga
Yuichi Nimura
Yuichi Nimura
Application Number:
JP14054498A
Publication Date:
April 23, 2008
Filing Date:
May 07, 1998
Export Citation:
Assignee:
Honda motor industry stock company
International Classes:
H01L21/368
Domestic Patent References:
| JP7101715A | ||||
| JP62213134A | ||||
| JP58088198A |
Attorney, Agent or Firm:
Toshihiko Sakurai