Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4080191
Kind Code:
B2
Inventors:
Nobuyuki Shibayama
Application Number:
JP2001283344A
Publication Date:
April 23, 2008
Filing Date:
September 18, 2001
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B08B3/12; B06B1/06; H01L21/304
Domestic Patent References:
| JP11150092A | ||||
| JP2001029908A | ||||
| JP2000061408A | ||||
| JP63064804A | ||||
| JP2000015082A |
Attorney, Agent or Firm:
Yoshito Fukushima