Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP4080401
Kind Code:
B2
Inventors:
Yoshinori Takagi
Hiroki Mizuno
Hiroki Mizuno
Application Number:
JP2003314209A
Publication Date:
April 23, 2008
Filing Date:
September 05, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B23Q3/08; H01L21/027; B25J15/06; H01L21/304; H01L21/68; H01L21/683
Domestic Patent References:
| JP2002246450A | ||||
| JP10064982A | ||||
| JP1303720A | ||||
| JP60200527A | ||||
| JP10086085A | ||||
| JP8314158A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita