Title:
パターン描画装置およびパターン描画方法
Document Type and Number:
Japanese Patent JP4081606
Kind Code:
B2
Inventors:
Yoshinori Kobayashi
Application Number:
JP2002291440A
Publication Date:
April 30, 2008
Filing Date:
October 03, 2002
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
G03F7/20; H01L21/027; G02B27/18
Domestic Patent References:
| JP2002372790A |
Foreign References:
| WO2002012961A1 | ||||
| WO1997043770A1 |
Attorney, Agent or Firm:
Takashi Matsuura
Hiroki Ogura
Tsuyoshi Nonaka
Shigeru Torayama
Tsubouchi Shin
Hiroki Ogura
Tsuyoshi Nonaka
Shigeru Torayama
Tsubouchi Shin