Title:
基板搬送システム
Document Type and Number:
Japanese Patent JP4087925
Kind Code:
B2
Inventors:
Hirai Tatsuto
Application Number:
JP17109297A
Publication Date:
May 21, 2008
Filing Date:
June 12, 1997
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
B65G49/06; H01L21/677; H01L21/68
Domestic Patent References:
| JP10270528A | ||||
| JP10022364A | ||||
| JP8139153A | ||||
| JP6132381A | ||||
| JP63002347A | ||||
| JP3079524A | ||||
| JP1100939A | ||||
| JP7330178A | ||||
| JP3009547A | ||||
| JP4133421A | ||||
| JP6048575A | ||||
| JP5090387A | ||||
| JP7010577A | ||||
| JP8297279A | ||||
| JP8281184A | ||||
| JP9208008A |
Attorney, Agent or Firm:
Junzo Yoneda
Hideo Sarada
Hideo Sarada