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Patent Searching and Data


Title:
レジスト組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP4088753
Kind Code:
B2
Inventors:
畠山 潤
小林 知洋
渡辺 武
Application Number:
JP2001369719A
Publication Date:
May 21, 2008
Filing Date:
December 04, 2001
Export Citation:
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Assignee:
信越化学工業株式会社
International Classes:
G03F7/004; C07C255/14; C07C255/16; C07C255/24; C07D295/14; C07D307/04; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
JP2000212152A
JP2017161A
JP58118585A
JP51143661A
JP2004536328A
JP7230169A
JP4230645A
JP5232706A
Foreign References:
US5869653
US4787933
Attorney, Agent or Firm:
小島 隆司
西川 裕子