Title:
表面弾性波装置内蔵の圧力・温度モニター
Document Type and Number:
Japanese Patent JP4088921
Kind Code:
B2
Abstract:
A pressure monitoring device includes a rigid base (2) which has secured thereto a lid (5) to define a hermetically sealed chamber (6). The lid (5) is of flexible metal material and the major surface (5A) of the lid forms a diaphragm which will deflect in response to changes in the pressure surrounding the device. A substrate (7) upon which a plurality of SAW devices are laid down is supported on a rigid frame (3A) of the base so that the central region thereof is unsupported between edges (11, 12). A dimple (10) is formed in the lid (5) and presses on a central region of the substrate (7). Changes in pressure will accordingly cause distortion of the central region of the substrate. The end regions (8, 9) of the substrate (7) carry further SAW devices so that, by analyzing the changes in characteristics of all the SAW devices a temperature compensated indication of pressure change, together with an indication of absolute temperature, may be provided by interrogating the SAW devices. The base (2) and the lid (5) are preferably both of metal alloy and may be secured together by soldering. Antennae associated with the SAW devices may be laid down as tracks on the surface of the base (2).
Inventors:
Freaks Graham Michael
Ville david daniel george
Kalinin Victor Alexandrovich
Beckley John Peter
Ray Arthur John
Ville david daniel george
Kalinin Victor Alexandrovich
Beckley John Peter
Ray Arthur John
Application Number:
JP2002534796A
Publication Date:
May 21, 2008
Filing Date:
October 10, 2001
Export Citation:
Assignee:
Transsense Technologies plc
International Classes:
G01L9/00
Domestic Patent References:
| JP8233678A | ||||
| JP61082131A | ||||
| JP62075222A | ||||
| JP4109341U | ||||
| JP1102736U | ||||
| JP1056695B2 | ||||
| JP2000132654A | ||||
| JP60093935U |
Foreign References:
| GB2235533A | ||||
| WO2000046580A1 | ||||
| US3878477 |
Attorney, Agent or Firm:
Nobuyuki Matsubara
Kiyoji Muraki
Kenichi Nakayama
Hashimoto Chikako
Sayaka Matsushima
Kiyoji Muraki
Kenichi Nakayama
Hashimoto Chikako
Sayaka Matsushima