Title:
プラズマ処理装置およびその初期化方法
Document Type and Number:
Japanese Patent JP4089873
Kind Code:
B2
Inventors:
Taro Ikeda
Iizuka Yashiro
Kaoru Yamamoto
Iizuka Yashiro
Kaoru Yamamoto
Application Number:
JP2002156785A
Publication Date:
May 28, 2008
Filing Date:
May 30, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H05H1/46; C23C16/44; H01L21/205
Domestic Patent References:
| JP6291049A | ||||
| JP2000315658A | ||||
| JP9213781A | ||||
| JP10289897A | ||||
| JP9191003A | ||||
| JP2000058514A | ||||
| JP2001023956A | ||||
| JP3122533U | ||||
| JP2002517086A | ||||
| JP8181124A | ||||
| JP9237779A | ||||
| JP6151369A | ||||
| JP58071627A | ||||
| JP63155727A |
Foreign References:
| WO1999062099A1 | ||||
| WO1998056102A1 |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara