Title:
真空処理装置
Document Type and Number:
Japanese Patent JP4090156
Kind Code:
B2
Inventors:
Shozo Watanabe
Hideo Haraguchi
Shigeyuki Yamamoto
Hideo Haraguchi
Shigeyuki Yamamoto
Application Number:
JP22953099A
Publication Date:
May 28, 2008
Filing Date:
August 16, 1999
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
C23C16/455; H01L21/302; C23C16/505; H01L21/3065
Domestic Patent References:
| JP11149995A | ||||
| JP11111494A | ||||
| JP11008225A | ||||
| JP7097690A | ||||
| JP64059818A | ||||
| JP9027485A | ||||
| JP9202974A | ||||
| JP61116841A | ||||
| JP11214361A | ||||
| JP7220896A | ||||
| JP11102900A |
Foreign References:
| WO1998001012A1 |
Attorney, Agent or Firm:
Yoshihiro Morimoto