Title:
閃光放射装置および熱処理装置
Document Type and Number:
Japanese Patent JP4096527
Kind Code:
B2
Inventors:
Kishi Owada
Akinobu Nakajima
Akinobu Nakajima
Application Number:
JP2001188152A
Publication Date:
June 04, 2008
Filing Date:
June 21, 2001
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/26; H05B41/32
Domestic Patent References:
| JP5764936A | ||||
| JP538182U | ||||
| JP2002252174A |
Attorney, Agent or Firm:
Masahiko Oi