Title:
塗布工具および塗布装置
Document Type and Number:
Japanese Patent JP4103598
Kind Code:
B2
Inventors:
Mutsumi Yasutake
Tsutomu Fukuda
Tsutomu Fukuda
Application Number:
JP2003008246A
Publication Date:
June 18, 2008
Filing Date:
January 16, 2003
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
B05C5/02
Domestic Patent References:
| JP11226469A | ||||
| JP51068671A | ||||
| JP2001009342A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Hideyuki Sugiura
Yasuhiko Murayama
Noriko Yanai
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Hideyuki Sugiura
Yasuhiko Murayama
Noriko Yanai