Title:
スパッタリング装置
Document Type and Number:
Japanese Patent JP4104028
Kind Code:
B2
Inventors:
Shogo Utsumi
Kanaya Kunitsu
Hidetoshi Kawa
Kanaya Kunitsu
Hidetoshi Kawa
Application Number:
JP18231597A
Publication Date:
June 18, 2008
Filing Date:
July 08, 1997
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
C23C14/50
Domestic Patent References:
| JP3089161U | ||||
| JP3034345A |
Attorney, Agent or Firm:
Masaru Ishihara