Title:
エッチング液
Document Type and Number:
Japanese Patent JP4104454
Kind Code:
B2
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| WO/2022/044893 | PROCESSING LIQUID, METHOD FOR PROCESSING SUBSTRATE |
| JPS5450441 | ETCHING METHOD FOR MOLYBDENUM THIN FILM |
Inventors:
Hideki Takahashi
Kenji Kuroiwa
Masaru Kato
Kenji Kuroiwa
Masaru Kato
Application Number:
JP2002380863A
Publication Date:
June 18, 2008
Filing Date:
December 27, 2002
Export Citation:
Assignee:
Kanto Chemical Co., Ltd.
International Classes:
C23F1/14; H01L21/308
Domestic Patent References:
| JP58016074A | ||||
| JP63176483A | ||||
| JP2003229420A | ||||
| JP60050185A | ||||
| JP2003109949A |
Foreign References:
| GB1261160B |
Other References:
Ultra Fast Etchant for Gold, Copper and Silver Films,Research Disclosure,英国,Industrial Opportunities Ltd.,1987年,281号,第554頁
Attorney, Agent or Firm:
Kiyoji Kuzuwa