Title:
基板研磨方法
Document Type and Number:
Japanese Patent JP4104950
Kind Code:
B2
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Inventors:
Kazuo Tanimoto
Yoshiharu Hidaka
Ikenouchi Katsuyuki
Mamoru Kanemoto
Yoshiharu Hidaka
Ikenouchi Katsuyuki
Mamoru Kanemoto
Application Number:
JP2002289619A
Publication Date:
June 18, 2008
Filing Date:
October 02, 2002
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B24B55/06; B24B37/00; B24B37/04; B24B37/30; H01L21/304
Domestic Patent References:
| JP9050976A | ||||
| JP63114870A | ||||
| JP10337656A | ||||
| JP2001274123A | ||||
| JP2002231664A | ||||
| JP6023664A | ||||
| JP11138429A | ||||
| JP2002192456A | ||||
| JP2002224947A | ||||
| JP200236102A | ||||
| JP2001196448A | ||||
| JP10118920A | ||||
| JP11277419A |
Foreign References:
| WO2002032625A2 |
Attorney, Agent or Firm:
Akio Miyai