シリコン単結晶およびその製造方法、評価方法

Title:

シリコン単結晶およびその製造方法、評価方法

Document Type and Number:

Japanese Patent JP4107700

Kind Code:

B2

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Inventors:

Katsuhiko Nakai
Hasebe Masami
Kuniteru Ota
Kazunori Ishizaka
Toshio Iwasaki

Application Number:

JP28465897A

Publication Date:

June 25, 2008

Filing Date:

October 01, 1997

Export Citation:

Assignee:

Cyltronic Japan Co., Ltd.

International Classes:

C30B29/06; G01N21/88; C30B15/00; G01N21/00; G01N21/94; G01N21/956; H01L21/66

Domestic Patent References:

Attorney, Agent or Firm:

Mikio Hatta

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