Title:
プラズマ処理方法およびプラズマ処理装置
Document Type and Number:
Japanese Patent JP4112821
Kind Code:
B2
Inventors:
Yoshihiro Yanagi
Morita Masashi
Morita Masashi
Application Number:
JP2001167162A
Publication Date:
July 02, 2008
Filing Date:
June 01, 2001
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/3065; H05H1/46; B01J19/08; C23C14/34; C23C16/509; H01L21/302
Domestic Patent References:
| JP10209258A | ||||
| JP7211769A | ||||
| JP9064160A | ||||
| JP9289193A | ||||
| JP11111830A | ||||
| JP10340887A | ||||
| JP10107012A | ||||
| JP2000091321A | ||||
| JP6283472A | ||||
| JP2000164563A | ||||
| JP9330974A | ||||
| JP2000200825A |
Attorney, Agent or Firm:
Masaru Ishihara
Previous Patent: JPH04112820
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