Title:
被加工体を反応的に処理する方法と真空処理装置、および同方法と同装置の使用
Document Type and Number:
Japanese Patent JP4115545
Kind Code:
B2
Abstract:
A plasma beam (1) is produced in an evacuated container (10), while workpieces are arranged parallel to the beam axis (A), with a radial off set from it. Fresh reaction gas (R) is introduced into the container, while used gas is sucked from it. The method is characterised by the fact that the workpiece to be simultaneously treated are arranged along an elongate surface of rotation around the plasma beam. The appts. includes a workpiece carrier system (24) coaxially surrounding the plasma beam.
Inventors:
Karner Johann
Pedracchini Mauro
Bergmann Erich
Pedracchini Mauro
Bergmann Erich
Application Number:
JP905096A
Publication Date:
July 09, 2008
Filing Date:
January 23, 1996
Export Citation:
Assignee:
OC Oerlikon Balzers AG
International Classes:
C23C14/24; C23C14/32; H05H1/48; C23C16/27; C23C16/34; C23C16/458; C23C16/513; H05H1/50
Domestic Patent References:
| JP6510566A | ||||
| JP62250169A | ||||
| JP3082748A | ||||
| JP3207854A | ||||
| JP3229882A | ||||
| JP3229883A | ||||
| JP6025846A | ||||
| JP7048666A | ||||
| JP7507600A | ||||
| JP61295377A |
Other References:
BARDOS L. et al.,Radio frequency plasma jet applied to coating of internal walls of narrow tubes,Journal of Vacuum Science and Technology A,1993年,Vol. 11, No. 4, Pt. 1,pp. 1486-1490
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Hidehiko Ito
Yutaka Horii
Toshio Morita
Hidehiko Ito
Yutaka Horii