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Title:
ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4116235
Kind Code:
B2
Inventors:
佐藤 健一郎
Application Number:
JP2000290654A
Publication Date:
July 09, 2008
Filing Date:
September 25, 2000
Export Citation:
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Assignee:
富士フイルム株式会社
International Classes:
G03F7/039; C08F220/18; C08F222/40; C08F232/00; C08K5/00; C08L45/00; G03F7/004; H01L21/027
Domestic Patent References:
JP2002062657A
JP2002082438A
JP2002072484A
JP2002161116A
JP2002012631A
JP2002296783A
JP2002023371A
JP2001209180A
JP2001147531A
Attorney, Agent or Firm:
高松 猛
矢澤 清純



 
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