Title:
検査装置
Document Type and Number:
Japanese Patent JP4120722
Kind Code:
B2
Inventors:
Akihiro Imamura
Takefumi Kato
Takefumi Kato
Application Number:
JP21735498A
Publication Date:
July 16, 2008
Filing Date:
July 31, 1998
Export Citation:
Assignee:
NOK CORPORATION
International Classes:
G01N21/88
Domestic Patent References:
| JP9304288A | ||||
| JP8271446A | ||||
| JP1202136A | ||||
| JP7306153A | ||||
| JP8240538A |
Attorney, Agent or Firm:
Yoichi Nomoto