Title:
原子状ラジカル測定方法及び装置
Document Type and Number:
Japanese Patent JP4127435
Kind Code:
B2
Inventors:
Toshio Goto
Akihiro Kono
Masaru Hori
Masafumi Ito
Yoneda Katsumi
Takashima Shigeyoshi
Akihiro Kono
Masaru Hori
Masafumi Ito
Yoneda Katsumi
Takashima Shigeyoshi
Application Number:
JP29550498A
Publication Date:
July 30, 2008
Filing Date:
October 16, 1998
Export Citation:
Assignee:
Toshio Goto
Masaru Hori
nu Eco Engineering Co., Ltd.
Masaru Hori
nu Eco Engineering Co., Ltd.
International Classes:
H01L21/302; H05H1/00; H01L21/205; H01L21/3065; H05H1/46
Domestic Patent References:
| JP2000124199A | ||||
| JP10102251A |
Attorney, Agent or Firm:
Osamu Fujitani