Title:
有極性重合体、感光性組成物、レジストパターン及びその形成方法、並びに、半導体装置及びその製造方法
Document Type and Number:
Japanese Patent JP4143005
Kind Code:
B2
Inventors:
Toshiyuki Arita
Satoshi Takechi
Satoshi Takechi
Application Number:
JP2003304819A
Publication Date:
September 03, 2008
Filing Date:
August 28, 2003
Export Citation:
Assignee:
富士通株式会社
International Classes:
C08F220/06; G03F7/039; C08F8/16; C08F220/12; H01L21/027
Domestic Patent References:
| JP2000241976A | ||||
| JP2002202604A | ||||
| JP2003241383A | ||||
| JP2003195507A | ||||
| JP2002244292A | ||||
| JP2002303975A |
Attorney, Agent or Firm:
Koichi Hirota
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