Title:
シリコン材料の膜厚を制御する方法
Document Type and Number:
Japanese Patent JP4147056
Kind Code:
B2
Inventors:
Katsuyuki Suga
Application Number:
JP2002172771A
Publication Date:
September 10, 2008
Filing Date:
June 13, 2002
Export Citation:
Assignee:
Sharp Corporation
International Classes:
G02F1/1368; H01L21/20; H01L21/336; H01L29/786
Domestic Patent References:
| JP61070714A | ||||
| JP2002164353A | ||||
| JP2002164283A | ||||
| JP2001060551A |
Attorney, Agent or Firm:
Tadahiko Ito