Title:
電源監視装置及びその制御方法、露光装置
Document Type and Number:
Japanese Patent JP4147081
Kind Code:
B2
Abstract:
A power monitoring apparatus monitors the voltage fluctuation range of an AC power supply and the duration of voltage fluctuations within the voltage fluctuation range. The power monitoring apparatus looks up a power failure rank table for determining the power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as the monitoring result to determine the power failure rank of the power supply. The power monitoring apparatus sends a power failure signal indicating the power failure rank to a power supply destination of an AC power supply.
Inventors:
Takehiko Iwanaga
Shigaraki Toshiyuki
Kazuhito Ogizuka
Shigaraki Toshiyuki
Kazuhito Ogizuka
Application Number:
JP2002278113A
Publication Date:
September 10, 2008
Filing Date:
September 24, 2002
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/027; G01R19/165; G05B19/18; H02J9/00; G01R31/40
Domestic Patent References:
| JP6019520A | ||||
| JP11055409A | ||||
| JP4269818A | ||||
| JP2097239A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura