Title:
紫外線レーザ装置のキセノンガス供給方法
Document Type and Number:
Japanese Patent JP4148491
Kind Code:
B2
Inventors:
Katsutoshi Terashima
Wakabayashi Osamu
Akira Sumitani
Wakabayashi Osamu
Akira Sumitani
Application Number:
JP27249699A
Publication Date:
September 10, 2008
Filing Date:
September 27, 1999
Export Citation:
Assignee:
KOMATSU LTD.
International Classes:
H01S3/036; H01S3/225
Domestic Patent References:
| JP11191660A | ||||
| JP62109380A | ||||
| JP4087388A | ||||
| JP11243242A | ||||
| JP3227079A |
Attorney, Agent or Firm:
Takahisa Kimura
Yoshiyuki Obata
Yoshiyuki Obata