Title:
電子線又はX線用ネガ型レジスト組成物
Document Type and Number:
Japanese Patent JP4149122
Kind Code:
B2
Inventors:
Toshiaki Aoi
Yutaka Adegawa
Yagihara Morio
Yutaka Adegawa
Yagihara Morio
Application Number:
JP2000219253A
Publication Date:
September 10, 2008
Filing Date:
July 19, 2000
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/038; C08F2/44; C08F2/54; C08F290/00; G03F7/004; G03F7/027; G03F7/033; G03F7/037; H01L21/027
Domestic Patent References:
| JP8272099A | ||||
| JP2000159828A | ||||
| JP11049847A | ||||
| JP8240911A | ||||
| JP2000147752A |
Foreign References:
| WO2000008525A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa