Title:
遠紫外線露光用ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4166402
Kind Code:
B2
Inventors:
Kenichiro Sato
Kunihiko Kodama
Yutaka Adegawa
Toshiaki Aoi
Kunihiko Kodama
Yutaka Adegawa
Toshiaki Aoi
Application Number:
JP2000051687A
Publication Date:
October 15, 2008
Filing Date:
February 28, 2000
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C07C69/753; C08L33/04; C08L35/02; H01L21/027
Domestic Patent References:
| JP2000336121A | ||||
| JP2001083695A | ||||
| JP11249310A | ||||
| JP10254140A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa