Title:
塗布装置、塗布方法、および塗布基板の製造方法
Document Type and Number:
Japanese Patent JP4166465
Kind Code:
B2
Inventors:
Yasushi Yamauchi
Application Number:
JP2001380864A
Publication Date:
October 15, 2008
Filing Date:
December 14, 2001
Export Citation:
Assignee:
Mitsubishi Chemical Corporation
International Classes:
B05C11/10; G03F7/16; B05C5/02; B05C9/00; B05D1/26; B05D3/00; B05D7/24
Domestic Patent References:
| JP8224521A | ||||
| JP2000005682A | ||||
| JP2001079472A | ||||
| JP1143666A | ||||
| JP2000135454A | ||||
| JP2001170539A |
Attorney, Agent or Firm:
Jiro Kobe