Title:
蓋部材開閉装置及びそれを備えたステーション
Document Type and Number:
Japanese Patent JP4169535
Kind Code:
B2
Inventors:
Ryusuke Tsubota
Kuniharu Saito
Kenji Hoshino
Kuniharu Saito
Kenji Hoshino
Application Number:
JP2002181167A
Publication Date:
October 22, 2008
Filing Date:
June 21, 2002
Export Citation:
Assignee:
Daihen Co., Ltd.
Murata Machinery Co., Ltd.
Murata Machinery Co., Ltd.
International Classes:
B65D85/86; H01L21/677; H01L21/673; H01L21/68
Domestic Patent References:
| JP2000286319A | ||||
| JP5246508A | ||||
| JP2001015576A |
Attorney, Agent or Firm:
Juichiro Yano