Title:
多検出器偏光解析装置及び多検出器偏光解析測定法
Document Type and Number:
Japanese Patent JP4171079
Kind Code:
B2
Abstract:
The ellipsometer has e.g. 32 input channels (6) with individual photodetectors feeding the multiplexer (12) and digitiser (13) of an electronic processing unit (4). The input channels are switched by a sequencer (19) which is synchronised by a phase modulator (24) and also controls an integrating digital prefilter (14), double-access buffer memory (15), digital signal processor (16) and double-access Fourier parameter memory (17). Physical parameters of the specimen are calculated (18) from the memorised Fourier parameters for a user interface (5) whereby information from several instruments can be correlated. The processing unit may take the form of a programmable logic circuit board.
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Inventors:
Bernard de revillon
Jean-Eve Parley
Jean-Eve Parley
Application Number:
JP23712696A
Publication Date:
October 22, 2008
Filing Date:
August 05, 1996
Export Citation:
Assignee:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
International Classes:
G01J4/04; G01N21/21
Domestic Patent References:
| JP5264355A |
Foreign References:
| EP0663590A1 |
Other References:
B. Drevillon 外4名,“Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysis”,Review of Scientific Instruments,1982年 7月,Vol.53, No.7,pp.969-977
Attorney, Agent or Firm:
Takiguchi Shoji
Koichi Nakazato
Koichi Nakazato