Title:
マスクブランクス用基板の製造方法
Document Type and Number:
Japanese Patent JP4173750
Kind Code:
B2
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Inventors:
Hiroyuki Akakawa
Application Number:
JP2003049948A
Publication Date:
October 29, 2008
Filing Date:
February 26, 2003
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
B24B37/00
Domestic Patent References:
| JP63076457U | ||||
| JP64002861A | ||||
| JP3047752U |
Attorney, Agent or Firm:
Kihei Watanabe