Title:
エレクトレット及びエレクトレットコンデンサー
Document Type and Number:
Japanese Patent JP4181580
Kind Code:
B2
Abstract:
A silicon nitride film (103) and a silicon nitride film (106) are formed to cover a charged silicon oxide film (105) serving as an electret.
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Inventors:
Toru Yamaoka
Hiroshi Ogura
Yuichi Miyu
Tomoyuki Sasaki
Hiroshi Ogura
Yuichi Miyu
Tomoyuki Sasaki
Application Number:
JP2005515593A
Publication Date:
November 19, 2008
Filing Date:
November 12, 2004
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01G5/013; H01G7/02; H01G5/16; H04R19/01
Domestic Patent References:
JP9283374A | ||||
JP2002033241A | ||||
JP2002518913A | ||||
JP2001231099A | ||||
JP7050899A |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura