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Patent Searching and Data


Title:
ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4181760
Kind Code:
B2
Inventors:
佐藤 健一郎
中尾 元
Application Number:
JP2001169802A
Publication Date:
November 19, 2008
Filing Date:
June 05, 2001
Export Citation:
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Assignee:
富士フイルム株式会社
International Classes:
G03F7/039; C08F232/08; G03F7/004; H01L21/027
Domestic Patent References:
JP2001209181A
JP2002296783A
JP10307401A
JP2000066380A
Attorney, Agent or Firm:
高松 猛
矢澤 清純