Title:
処理装置及び処理方法
Document Type and Number:
Japanese Patent JP4182643
Kind Code:
B2
Abstract:
A processing unit of the invention is a processing unit of an object to be processed, which includes: a stage on which an object to be processed is placed; a processing container that contains the stage; and a stage-tilting mechanism that can tilt the stage with respect to a horizontal direction and that can change a direction of the tilt without rotating the stage as time passes.
Inventors:
Daisuke Hayashi
Application Number:
JP2001003098A
Publication Date:
November 19, 2008
Filing Date:
January 10, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; H01L21/302; H01L21/00; H01L21/205; H01L21/3065; H01L21/687
Domestic Patent References:
| JP2000311866A | ||||
| JP2000202347A | ||||
| JP62073726A | ||||
| JP5326454A | ||||
| JP9036027A |
Attorney, Agent or Firm:
Akihiro Asai