Title:
半導体製造装置の寿命診断方法
Document Type and Number:
Japanese Patent JP4184638
Kind Code:
B2
Abstract:
A method for diagnosing life of manufacturing equipment having a rotary machine, includes: measuring reference time series data for characteristics before deterioration of the manufacturing equipment occurs; finding a reference auto covariance function based on the reference time series data; extracting a reference variation caused by variations of the process condition and power supply from the reference auto covariance function, and calculating a cycle of the reference variation; measuring diagnostic time series data for the characteristics in a sequence to be measured of the manufacturing equipment; finding a diagnostic auto covariance function based on the diagnostic time series data; and determining the life of the manufacturing equipment from the diagnostic auto covariance function using a component with a cycle shorter than a cycle of the reference variation.
Inventors:
Shuichi Samata
Ushihisa Yukihiro
Ken Ishii
Takashi Nakao
Ushihisa Yukihiro
Ken Ishii
Takashi Nakao
Application Number:
JP2001263548A
Publication Date:
November 19, 2008
Filing Date:
August 31, 2001
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/02; H01L21/302; G05B23/02; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2000114130A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu