アルカリ現像装置用洗浄剤組成物

Title:

アルカリ現像装置用洗浄剤組成物

Document Type and Number:

Japanese Patent JP4189158

Kind Code:

B2

Inventors:

Hiromitsu Kobayashi
Hirohisa Nito
Shimizu Masaaki
Koji Kitamura

Application Number:

JP2002058973A

Publication Date:

December 03, 2008

Filing Date:

March 05, 2002

Export Citation:

Assignee:

ADEKA CORPORATION

International Classes:

C11D7/60; G03F7/32; C11D7/26; H01L21/027; H01L21/30

Domestic Patent References:

Attorney, Agent or Firm:

Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Taizo Shiraishi

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