Title:
多層型圧電素子、及びその製造方法
Document Type and Number:
Japanese Patent JP4197494
Kind Code:
B2
Abstract:
A multi-layered piezoelectric device has, on a ceramic-made substrate, a plurality of piezoelectric portions and a plurality of electrodes electrically connected to the piezoelectric portions, in layers, wherein a first piezoelectric portion is made of a piezoelectric ceramic composition containing Ni in an amount of 0.08 to 0.31% by mass (in terms of NiO), second and upper piezoelectric portions are made of a piezoelectric ceramic composition of higher Ni content than in the first piezoelectric portion, and an electrode is provided at least between the first piezoelectric portion and the second piezoelectric portion. This multi-layered piezoelectric device has a very high piezoelectric characteristic, is superior in transmission of oscillation between ceramic substrate and piezoelectric portions, and can be suitably used in actuators, sensors, etc.
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Inventors:
Toshikatsu Kashiwaya
Mutsumi Kitagawa
Mutsumi Kitagawa
Application Number:
JP2003566912A
Publication Date:
December 17, 2008
Filing Date:
February 05, 2003
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L41/083; C04B35/49; C04B35/493; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/314; H01L41/39
Attorney, Agent or Firm:
Ippei Watanabe