SMIFポッド格納、搬送及び回収システム

Japanese Patent JP4208411

B2

A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.

Bonora Antony Sea
Martin Raymond S
Fosnite William Jay
Nets robert
Oden Joshua Tea
Mosia Terry El

JP2000501973A

January 14, 2009

July 09, 1998

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Asyst Technologies,Inc.

B65G1/04; B65G1/00; B65G49/07; H01L21/00; H01L21/677

JP1145906A
JP5017007A
JP4171716A
JP3244121A
JP9110109A

US5628604

Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Nobuo Ogawa
Takaki Nishijima
Atsushi Hakoda

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