Title:
クリーンストッカと物品の保管方法
Document Type and Number:
Japanese Patent JP4215079
Kind Code:
B2
Abstract:
A reticle rotatable rack (4) is provided at an upper position, and a pod rotatable rack (6) is provided at a lower position in a clean stocker (2). A clean gas is supplied downwardly.
In the stocker, a pod transportation device (8) and a reticle transportation device (10) are elevated and lowered. Load ports (20,21), a pod opener (12), and the pod rotatable rack (6) are connected by the pod transportation device (8). The pod opener (12) and the reticle rotatable rack (4) are connected by the reticle transportation device (10).
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Inventors:
Makoto Yamamoto
Application Number:
JP2006207400A
Publication Date:
January 28, 2009
Filing Date:
July 31, 2006
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
B65G1/00; B65G1/133; G03F1/66; H01L21/027; H01L21/677
Domestic Patent References:
| JP62172127A | ||||
| JP2005203498A | ||||
| JP2000091401A | ||||
| JP2005347667A |
Attorney, Agent or Firm:
Akira Shioiri
Mika with salt
Mika with salt