Title:
ウエハ移載システム及びウエハ移載方法、並びに無人搬送車システム
Document Type and Number:
Japanese Patent JP4219579
Kind Code:
B2
Abstract:
The present invention relates to a wafer transfer system which reduces time for orienting a wafer in transferring the wafer and improves the efficiency of transferring the wafer. The central position of a wafer 10 set on a place table 41 is calculated, the turn angle of a place table 41 when the wafer 10 is in the predetermined orientation is calculated based on the calculation result of the central position and positional information of an ID mark 11 received in advance and the quantity of expanding and contracting a transfer arm 30 and the turn angle of a turntable 39 are calculated for setting the wafer 10 such that the ID mark 11 is in the predetermined position and orientation to an optical character reader OCR 43, and the turn angle of the place table 41 calculated base on the turn angle of the turntable 39 is corrected, the place table 41 is turned only by the corrected turn angle and the wafer 10 is turned and transferred to the OCR 43 by the transfer unit 3 (Fig. 2).
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Inventors:
Shuji Akiyama
Katsutoshi Tomita
Katsutoshi Tomita
Application Number:
JP2001223059A
Publication Date:
February 04, 2009
Filing Date:
July 24, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
村田機械株式会社
村田機械株式会社
International Classes:
B65G49/07; B61D27/00; G05D1/02; H01L21/68; H01L21/00; H01L21/677
Domestic Patent References:
| JP2000200810A | ||||
| JP11274264A |
Foreign References:
| US5870488 | ||||
| US5308222 |
Attorney, Agent or Firm:
Juichiro Yano