Title:
インライン式蒸着装置における蒸着室への蒸発源の連続送り込み方法
Document Type and Number:
Japanese Patent JP4227220
Kind Code:
B2
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Inventors:
Takeshi Yamazaki
Application Number:
JP19550398A
Publication Date:
February 18, 2009
Filing Date:
July 10, 1998
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C14/56
Domestic Patent References:
JP9256142A | ||||
JP6088233A |
Attorney, Agent or Firm:
Masatsugu Suzuki