Title:
インライン型圧力センサー
Document Type and Number:
Japanese Patent JP4234024
Kind Code:
B2
Abstract:
In an in-line type fluid pressure sensor for determining the fluid pressure in flow of a fluid circulated through a fluid flow circuit employed in a semiconductor manufacturing apparatus, an inner wall surface located particularly in a downstream side connection port ( 6 ) of a body member ( 1 ) of the sensor is moderately inclined in contour in longitudinal section, which makes it possible for the fluid to flow through a fluid introduction portion ( 9 a) of the body member ( 1 ) in a smooth manner without standing in flow in the fluid introduction portion ( 9 a). Due to this, in such a fluid introduction portion ( 9 a), there is not any fear of occurrence of the fluid flow standing phenomenon or problem at all. This makes it possible for the in-line type fluid pressure sensor to realize a precise measurement of the fluid pressure in flow of the fluid circulated through the fluid flow circuit.
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Inventors:
Masahiro Hasunuma
Application Number:
JP2004016120A
Publication Date:
March 04, 2009
Filing Date:
January 23, 2004
Export Citation:
Assignee:
Surpass Industry Co., Ltd.
International Classes:
G01L19/00
Domestic Patent References:
| JP8035896A | ||||
| JP55127247U | ||||
| JP2128547U | ||||
| JP3231688A |
Attorney, Agent or Firm:
Haruo Saito