透明導電膜の製造装置及びその製造方法

Title:

透明導電膜の製造装置及びその製造方法

Document Type and Number:

Japanese Patent JP4236245

Kind Code:

B2

Inventors:

Atsushi Ota
Kenichi Saito
Isao Sugiura
Noriaki Tani
Takashi Komatsu
Kiyota Junya

Application Number:

JP2002341753A

Publication Date:

March 11, 2009

Filing Date:

November 26, 2002

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

C23C14/35; C23C14/08

Domestic Patent References:

Attorney, Agent or Firm:

Patent Corporation Exio
Kiyoshi Higashida
Masaaki Yamashita
Launch Yoji

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