Title:
プローブカード
Document Type and Number:
Japanese Patent JP4237191
Kind Code:
B2
Abstract:
The objective of the present invention is to provide a type of probe assembly with a long lifetime and low cost, as well as a type of probe card using same. Probe assembly 100 attached on the probe card has probe holder 200 that holds plural probes Q at prescribed positions and leaf spring mechanism 300 with probe holder 200 attached on it. Said leaf spring mechanism 300 has leaf spring cover 360 connected to probe card base plate 410 and leaf spring 330, as well as pin row base plate 310 with probe holder 200 attached on it. When the bump electrodes are contacted, pin row base plate 310 can move towards leaf spring cover 360 via leaf spring 330.
Inventors:
Takeshi Watanabe
Application Number:
JP2006076103A
Publication Date:
March 11, 2009
Filing Date:
March 20, 2006
Export Citation:
Assignee:
Texas Instruments Japan Ltd.
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JP8083824A | ||||
| JP2005083863A | ||||
| JP9036188A | ||||
| JP9153528A |
Attorney, Agent or Firm:
Kyozo Katayose