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Title:
高速原子線源装置およびこれを具備する加工装置
Document Type and Number:
Japanese Patent JP4237870
Kind Code:
B2
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Inventors:
Noboru Uwabara
Application Number:
JP14464799A
Publication Date:
March 11, 2009
Filing Date:
May 25, 1999
Export Citation:
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Assignee:
Japan Aviation Electronics Industry Co., Ltd.
International Classes:
H05H3/02; C23C14/46
Domestic Patent References:
JP61183900A
JP10106798A
JP2254157A
JP63083257A
JP60195093A
JP8255698A
Attorney, Agent or Firm:
Naoki Nakao
Yukio Nakamura
Taku Kusano
Minoru Inagaki



 
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