Title:
基板処理装置および処理方法
Document Type and Number:
Japanese Patent JP4241513
Kind Code:
B2
Inventors:
Mamoru Sueyoshi
Application Number:
JP2004169346A
Publication Date:
March 18, 2009
Filing Date:
June 08, 2004
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
C23C16/44; H01L21/205
Domestic Patent References:
| JP5226461A | ||||
| JP6025859A | ||||
| JP9330885A | ||||
| JP11186168A |
Attorney, Agent or Firm:
Patent Business Corporation IPS